Hitachi S-4800 manual Replacement Parts

Table of Contents (Cont’d)

	4.4	Troubleshooting		4-12
		4.4.1	When Column Evacuation does not Work	4-12
		4.4.2	When Specimen Exchange Chamber Vacuum is not Good	4-12
		4.4.3	When Specimen Chamber Vacuum is not Good	4-13
		4.4.4	When Ion Pump Vacuum Degraded	4-13
		4.4.5	When Emission Current is not Set at Normal Value	4-14
		4.4.6	When Image is not Shown on Screen	4-14
		4.4.7	When Image is Very Noisy	4-15
		4.4.8	When You cannot Correct Astigmatism	4-16
		4.4.9	When Auto Focus or Auto Stigma does not Work Satisfactorily	4-16
		4.4.10	When S-4800 control program does not start up	4-17
		4.4.11	When PC has Hanged up	4-17
		4.4.12	When Error Messages are shown	4-18
	4.5	Operation for shutting down all power supply of S-4800		4-18
	4.6	Operation when power was shut down by power line failure		4-18
	4.7	Operation for Starting S-4800		4-19
	4.8	Operation when power line failure recovered		4-20
	4.9	Operation when Water supply stopped by failure		4-20
	4.10	Gun Baking operation		4-21
	4.11	Caution on Maintenance		4-25
5.	REPLACEMENT PARTS			5-1
	5.1	Consumables and Spare Parts		5-1
		5.1.1	Consumables	5-1
		5.1.2	Replacement Parts	5-2
		5.1.3	Spare Parts	5-3
6.	ACCESSORY OPERATION			6-1
	6.1	Model S-5080Auto-Camera (Option)		6-1
		6.1.1	Configuration	6-1
		6.1.2	Specifications	6-3
		6.1.3	Assembling the Camera	6-5
		6.1.4	Operation	6-6

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