Hitachi S-4800 manual Gun Baking operation

4.10Gun Baking operation

CAUTION

Gun baking operation must be carried out by a service engineer or a person who has been trained by Hitachi High-Technologies Corporation or its service representatives.

Use the following steps for gun baking operation.

(1) Turn HV to OFF.

NOTICE

Confirm that the HV Lamp on the right side ion pump cover is extinguished. If it still is lit, never go to next steps.

(2) Remove two fixing screws and then the protection cover.

(A protection is provided so that gun HV is forced to off when the cover is removed. )

(3)Pull out the HV cable from the electron gun

(4)Insert the HV cable into the HV cable holder provided at the left side of ion pump cover.

(A protection is provided so that baking will not start if the cable is not placed in the holder.)

HV Lamp

Protection cover Screws

(5)Remove two screws at the top of the column cover and remove the cover.

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