Hitachi S-4800 manual Magnification, Electron Optics

SPECIFICATION

Specifications for Hitachi Model S-4800, Field Emission Scanning Electron Microscope

1. Resolution:
Accelerating voltage 15 kV
Working distance = 4 mm	1.0 nm
Accelerating voltage 1 kV
Working distance = 1.5 mm	2.0 nm

2. Magnification:
High magnification mode	100×	to 800,000×
Low magnification mode	30×	to 2,000×

3.Electron Optics:

(1)	Electron gun	Cold cathode field emission type
(2)	Extracting voltage (Vext)	0 to 6.5 kV
(3)	Accelerating voltage (Vacc)	0.5 to 30 kV (in 100 V steps)
(4)	Lens	3-stage electromagnetic lens, reduction type
(5)	Objective lens aperture	Movable aperture (4 openings selectable/
		alignable outside column).
		Self-cleaning thin aperture

(6)Astigmatism correction coil

(stigmator)	Electromagnetic type
(7) Scanning coil	2-stage electromagnetic-deflection type

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