Hitachi S-4800 manual Coordinate notation

3.5.7Operation of the Specimen Stage (Type 2 - 5-Axis Motorized Stage)

The S-4800 type 2 SEM provides a 5-axis motorized stage

3.5.7.1 Coordinate notation

S-4800 utilizes two coordinate notation system, stage (mechanical) coordinate and sample coordinate. The sample coordinate system will be better for using the Rotation Assist function. The stage coordinate system is also available for users familiar with previous Hitachi SEMs using the stage coordinate system.

(1)Relationship of stage and sample coordinates Following is an example of 5 inches diameter sample.

On the stage coordinate system, the center of the sample is (X=35,Y=55mm) and the origin is at the upper-left corner of XY movable area.

On the sample coordinate system, the center of the sample is (X=0,Y=0mm) and the origin fits to it.

5 inches sample	Stage movable area	5 inches sample	Stage movable area
	(35,-12.5)		(0,62.5)
(0,0)	(110,0)	(-35､-55)	(75,-55)

(-27.5,55)

X

Y

(137.5,55)

(0,55) (35,55)

(-62.5,0)

(-35,0)

Y

(62.5,0)

X

(0,0)

(0,110)	(110,110)	(-35,55)	(75,55)
(35,117.5)		(0,-62.5)
Stage (mechanical) coordinate		Sample coordinate system

(2) Selecting a coordinate system

Open the Optional Setup dialog window by selecting Stage command in Optional Setup menu.

On the COORDINATE area, select Sample or Stage. OK button will update the coordinate system.

NOTICE

The sample coordinate is not exactly the coordinate of the sample. It is not rotated with the sample when it is rotated.

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