•5120x3840
Highest resolution. Effective for relatively low magnification and containing very fine structure.
Note that the large image size requires long processing time for creation, saving, loading and image processing.
NOTICE
For large size captured images, there are following limitations.
(a)CD Measurement function works on 2560×1920 pixels or smaller images.
(b)Color mixing on SEM Data Manager works for 1280×960 and 640×480 pixels images.
(c)Pseudo Coloring on SEM Data Manager works for 2560×1920 pixels or smaller images. In above cases, a message will be shown and the specified commands are canceled.
(2) Capture Speed / number of frame Integration
In the CAPTURE SPEED/INTEGRATION area of the Setup dialog window - Image tab, select a number of frames to be integrated for Fast scan integration and a scanning time for Slow scan.
•Fast 1/Fast 2: 16 to 1024 frames integration
•Slow: 20 to 160 second scanning time
3.6.4Image Capturing
To start Image Capturing, click the Capture 
button on the control panel. When the scanning speed is set at TV or FAST, frame integration is performed. When the scanning speed is set at SLOW1 to SLOW5 or RED, a single frame slow scan is performed. Image capturing can be started either in RUN or FREEZE status.
After the scanning is finished, the Captured Image window opens and the captured image is added in the list as a thumbnail.
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