Hitachi manual Operation for Starting S-4800

Models: S-4800

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4.7Operation for Starting S-4800

(1)Turn the MAIN switch in the power distribution panel of customers site to ON.

(2)At the back of the display unit, turn the MAIN breaker to ON and press the RESET switch. A sound of relay will be emitted form inside of the unit.

NOTICE

If the MAIN breaker was not turned off after power line failure occurred, RESET does not work. In the case, once turn the MAIN switch to off and then, turn it ON.

MAIN breaker (ELB)

RESET button

Straight Lever type

Round Handle type

 

 

(3)Turn IP, EVAC, DISPLAY breakers to ON. (Keep the OUTER BAKE breaker off. Turn it ON when making gun baking)

(4)Turn IP1, IP2 and IP3 switches on the evacuation control panel to ON. Lamps in the RESET switches of each pump will be lit. It lamps are not lit, Press RESET buttons. If the lamp is once lit and go out soon, over current protector for the ion pump power supply may be driven. Repeat pressing RESET switch with about 10 seconds intervals.

If the lamp is not lit at all, protection breakers may be driven to off.

Remove the breaker cover plate on the left side cover of main console and check it. If it is OFF position turn it ON and repeat RESET switch.

(The inside of the breaker cover plate, no dangerous voltage parts exist)

Breaker cover plate

IP protection breakers

(5) Turn the EVAC power switch to ON. Evacuation will start and completed after about 1 hour.

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Page 271
Image 271
Hitachi manual Operation for Starting S-4800