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Hitachi S-4800 manual Installation Manual for the SEC Guide Rail for Installer

Models: S-4800

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Troubleshooting Specifications Install Error codes Signal Select block Password Login Wiring Warranty Dimension

Page 287

6.2Installation Manual for the SEC Guide Rail (for Installer)

PHOTO CRT unit

Camera

Apertur

6 - 7

Page 286 Page 288

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Hitachi S-4800 manual Installation Manual for the SEC Guide Rail for Installer

Page 286 Page 288

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Contents

For Page Foreword Foreword Exclusions from Guarantee Period of GuaranteeDetails of Guarantee Limitations on Guarantee After-sales Service Installation Available Training Programs Safety Summary Maintenance of Warning Labels Safety SUMMARYcont’d Electrical Hazard High Temperature Hazard Laser light Hazard Fig S-1 Warning labels on the Main unit standard version Fig S-2 Warning labels on the Display unit standard version Pinch Fig S-3 Warning labels on the Main unit Ansi style labels Fig S-3 Warning labels on the Display unit Ansi style labels Electron Gun / Ion pump Baking Beware of high Rotary Pump TemperatureBeware Electric shock Laser Light Cooling Water Backup of Important DataWater Leakage Detection Third Party’s Industrial or Proprietary Rights Protection against Computer Viruses Do Not Change Computer SettingsThird Party’s Application Programs Personal Computer PC Power Failure Fig S- 5 Location of Emergency Off button Emergency Off Button Power Supply and Grounding Connection Main Power Disconnect Ion Pump Baking power supplyUnit power supply Electron Gun Fig S- 6 Location of safety interlock Safety Safety Fig S- 9 Gravity location of Main unit Type1 Fig S- 10 Gravity location of Main unit Type2 Fig S- 11 Gravity location of Display unit Fig S- 12 An example of the water-leakage detector Precautions on Handling Precaution General Precautions Others Flashing Status Transition of Adsorbed Gas Molecules on Cathode Tip Precaution Electron Optics Magnification Display Unit Specimen Stage Protection Devices Evacuation System Installation Environment Power RequirementsPhysical Dimensions Oscillation Allowable Amplitude Z Oscillation Allowable Amplitude X, Y∝m Peak to Peak Water Supply and Drain Model S-4800 Field Emission Scanning Electron Microscope Table of Contents Cont’d Functions Table of Contents Cont’d Maintenance Replacement Parts Room Temperature and Humidity Installation Requirements General Grounding Line Power Requirement Stray Magnetic Field Vibration Allowable Amplitude Z Floor VibrationAllowable Vibration Vibration Allowable Amplitude X, Y Vibration Transmittance Frequency Characteristics External Noise Sources Power Line Noise and Electric Field Noise Site Requirements Disturbance by Sound Waves Installation Layout example Materials or Instruments to be prepared by User Wiring Connection of the step down transformer Power and Ground Wirings 100/200V Safety circuit Functions S-4800 Main Unit type Control Knobs and Switches on Main Unit Main unit Column Sectional View of S-4800 Column Specimen Stage type Large Specimen Stage type Specimen exchange device Evacuating System 8a Evacuation Control Panel 8a Display / Operation area IP1 Page Page Shows the display unit Control Knobs and Switches on Display Unit 10 PC Panel PC power switch 12 Mouse 4800 Power user level, no password Initially following users are set when sippedAdministrator Administrator level, no password 15 S-4800 Loin dialog window 16 S-4800 Main window 2 S-4800 SEM Main WindowPage Page Direct Photo MenuOpen SEM Data Manager Opens the SEM Data Manager window Direct Save Condition Save Mag ModeColumn Condition Load Capture Reso Split DM ModeRun Freeze Capture Login Setting Optional SetupOptional Setup Stage Optional Setup General ECO mode setting Maintenance Vacc select Control PanelFunctional blocks on the Control Panel 18 Control panel HV control block Execute button Intensity Auto control Scan control block Magnification control Monitoring function Align Capture button Image recordingPage 19 Control Panel Dual screen mode Run / Freeze buttons Extension for Dual screen mode 20 Operation panel Operation Panel Signal Select block OPE Condition block 6.3 R.ROTATION block Scan Mode block Data Entry block Scan Size block Edge Enhance Signal Processing blockSmooth Sharpen Color Mixing block Tilt Compensation block Other optional function block Scroll bar and area marker block Arrangement of control blocks 22 Mouse control Focus/stigma/contrast/brightness 21 Mouse Focus/stigma/contrast/brightness adjustmentMouse operation on the scanning image Exchanging mouse control functionsPage 23 Mouse control stage Setup dialog windowStage and image shift tools Column tab Page Image tab 1Memory Photo Record tab1Auto Data Display 5Embed into Image checkbox 1Film Speed 24 Condition Load/Save 8.4 OP. Cond tab Captured Image Window Alignment Dialog Window Reset buttonReset All button SEM Data Manager Window Comm Port Selects one of communication ports Speed Oblique Dialog Window Password Setting Dialog Window Split/Dual Mag Controller Opt Signal Processing Dialog WindowSave Image Dialog Window Using Short-Cut Keys Operation Display Power Preliminary Operation Check of Column Vacuum Flow the cooling water Starting the Display Use of Anti-Contamination Trap Specimen Preparation for Materials Specimen Setting and Specimen Exchange Specimen Exchange Position Adjustment of Specimen Height Extracting specimen from stage How to Set SpecimenPage Turn the knob clockwise so as the Unlock mark comes upwards Setting a specimenOpening the specimen exchange chamber door Flashing About flashing Flashing Procedure Accelerating VoltageEmission Current Setting of Accelerating Voltage and Emission Current Application of High Voltage Selecting Electron Optical Column Condition Optimizing the Electron Beam Selecting a Magnification ModeHigh Mag mode Objective lens Specimen Low Mag mode area Page Low Mag Mode Column Alignment Operation Circular image Adjust Page WD mm Lowest magnification High Mag Mode SE detector Operation for Image Observation BSE-H Signal Control General Characteristic of signals utilized in S-4800Page Selecting Magnification Selecting Scanning Speed Slow 4 38 sec/frameFull screen Image Brightness and Contrast Adjustment Page Page Focus and Astigmatism Correction Page Defocusedfocused Movable range limitation of X, Y and R axes Operation of the Specimen Stage Type I Manual StageMovable range and specimen exchange position Tilt and Z axes limitation 6.4 3 axes motorized stage Type1 stage option Stage Locking Movable range of X and Y directions 3 axes motorized stage Coordinate notation Movable range and specimen exchange position Specimen block Setting specimen size and detectors in use Valious operation for specimen stage Stage tab Upper button Ball Lower button 7.6 X, Y, R axes operation Tilt axes operation Page Stage mouse operation on the scanning image Page Page Page Page Adjust tool Position memory function Stage History function Image Navigation Page Rotation Assist function 35､-55 75,-55 62.5,0 35,0 50,10 -34,10 35,55 75,55 Rotation / tilt eucentric function and calibration Calibration Following calibration commands are provided Page Page Page Stage lock Stopping stage and Returning to previous stage position Moveable range and limitation by optional detectors Φ75 specimen XY movable range for various specimen size Allowable minus Tilting angle Allowable plus Tilting angle for various specimen size Saving and Recording Images Preparing Images for Recording Setting Conditions for Image Capturing Image Capturing Manager Saving a Scanning Image Direct Save Taking Photographs Option Saving Captured ImagesPage Photographing saved images Using SEM Data Manager Taking Out a Specimen Setting the Stage at the Specimen Exchange PositionTurning High Voltage Off Page Closing Windows and Shutting the Display Power Screen Mode Using Other FunctionsPage Split Screen and Dual Mag Mode Signal Selection and Color Mixing Page Ray Analysis Mode Drag the cursor with the mouse Signal Processing Page Operating Condition Memory Page Data Entry Function Pseudo Color DisplayPage Show Raster Rotation, Dynamic Focus and Tilt Compensation Page Printing images using Report generation function 100 Copy Image information text Oblique Image Optional setting 104 Setting Login Name 106 Accelerating Voltage and Image Quality Image Quality Objective Lens Aperture Size and Image Quality Condenser Lens Setting and Image Quality Preparative Operation for Alignment Mechanical Column Alignment Alignment of the Beam Monitor Aperture Mechanical Alignment of the Electron Gun Mechanical Alignment of the Second Condenser Lens Alignment of the Objective Lens ApertureMechanical Alignment of the First Condenser Lens Aperture Alignment electro-magnetic alignment Stigma Alignment electro-magnetic alignment 113 Precaution About SEM Data Manager Functions 3.12.2.1 Image Database Menu and tool buttons 117 118 Operation Registering Images on SEM Data Manager Database Selecting User name and opening data tree 121 Data Entry Image informationViewer display 123 124 Contrast Conversion → → 127 Image Processing Color Mixing 130 Image file operation Printing images 132 133 Slide show Optimizing and repairing database file Replacement and Cleaning of Objective Lens Aperture Maintenance Objective Lens Aperture unit Cleaning of Aperture Plates Baking of Aperture Plate Oil Change Replacement of Oil Mist Trap Symptom Cause Countermeasure Troubleshooting Checkup and Maintenance Page Symptom Probable Cause Remedy Troubleshooting of Air Compressor Location and Functions of Major Components When Specimen Exchange Chamber Vacuum is not Good Troubleshooting When Column Evacuation does not Work When Ion Pump Vacuum Degraded When Specimen Chamber Vacuum is not Good When Image is not Shown on Screen When Emission Current is not Set at Normal Value When Image is Very Noisy When Auto Focus or Auto Stigma does not Work Satisfactorily When You cannot Correct Astigmatism When PC has Hanged up When S-4800 control program does not start up Operation when power was shut down by power line failure When Error Messages are shownOperation for shutting down all power supply of S-4800 Operation for Starting S-4800 Operation when Water supply stopped by failure Operation when power line failure recovered Gun Baking operation Beware of high Temperature Page Beware of high Temperature Page Consumables Consumables and Spare Parts Part Name Use Expiration Replacement Parts Part Name Location ’ty Used Spare Parts Model S-5080 Auto-Camera option Configuration Configurations of Various Film Holder Units Option Remarks Specifications Model S-5080 Auto-Camera option 4″ × 5″ Film Magnification Assembling the Camera Aperture for Each Kind of Film Operation Installation Manual for the SEC Guide Rail for Installer Index PRECAUTION-7, PRECAUTION-9, PRECAUTION-11 Edit menu Copy Attribute command 21, 3-101 PRECAUTION-8, PRECAUTION-11 PCI PRECAUTION-10 Transfer 2-21, 2-31, 2-48, 3-72

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