INTERLOCK

 

Electron Gun

The Gun cable is now interlocked with a momentary switch.

 

If the cover at the top of the electron gun is removed to

 

disconnect gun cable, the High Voltage applied to the electron

 

gun is shut off. This switch can be overridden for service.

 

However, if the cable is replaced the service override is removed.

Ion Pump

The ion pump cover at the back of the electron optical column

 

has a safety interlock switch. If the cover is removed, the High

 

Voltage supplied to the ion pumps is shut off and lamps in the

 

RESET switches for ion pumps located on the evacuation control

 

panel will go off. For service the switches can be overridden,

 

but as soon as the ion pump cover is put again, the service

 

override is removed.

Other High Voltages

High voltage power supply for photo multipliers and electrodes

 

are placed inside of a box located at the behind of the specimen

 

chamber. The cover of the box has a safety interlock switch. If

 

the cover is removed, the High Voltage supplied to the photo

 

multipliers and electrodes is shut off. For service the switches

 

can be overridden, but as soon as the cover is put again, the

 

interlock is functional.

Baking power supply

Baking heater power supply connectors are placed at the right

 

side of the ion pumps cover. To connect heater connectors, the

 

box cover of the connector must be removed. The box cover of

 

the connector has a safety interlock switch. The baking power is

 

shut off when the cover is removed. After connecting connectors,

 

put the cover again. The baking power then becomes applicable.

Unit power supply

Four side covers of the Main unit have safety interlock switches

 

one for each. If one of the side covers is removed, AC power

 

supply for the Main unit (for evacuation system, ion pump power

 

supply and stage controller) will be shut off. The switches can be

 

overridden for service. However, if the covers are put again, the

 

service override is removed.

 

The interlock location is shown in fig S-6

Protection for Earthquakes

It is recommended that the protection for movement of Main unit

 

and Display unit during earthquakes is to be provided by user as

 

shown in figures S-7 and S-8.

Gravity location of units

The gravity location of Main and Display unit are shown in fig S-

 

9 through S-11.

Water-leakage detection

It is recommended that the water–leakage detector is to be

 

provided by user. Figure S-12 shows an example of the water–

 

leakage detector.

SAFETY - 17

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Image 25
Hitachi S-4800 manual Electron Gun, Ion Pump, Other High Voltages, Baking power supply, Unit power supply