3.11Mechanical Column Alignment
For normal operation, mechanical alignment of the electron gun and condenser lens is not necessary.
If, however, an electromagnetic alignment is not sufficient, proceed with a mechanical alignment using the following process:
1.Preparative operation for Alignment
2.Mechanical alignment of the electron gun
3.Alignment of the beam monitor aperture
4.Alignment of the objective lens aperture
5.Mechanical alignment of the first condenser lens
6.Mechanical alignment of the second condenser lens
7.Stigma alignment
8.Aperture alignment
NOTICE
Before performing mechanical alignment, wait for more than two hours after starting the heating of the objective lens aperture. If mechanical alignment is made immediately after the start of heating the objective lens aperture, the alignment condition will be affected by thermal expansion of the objective lens aperture.
3.11.1Preparative Operation for Alignment
Before proceeding with a mechanical alignment, make the following arrangements.
(1)Set the specimen into the specimen chamber.
(2)Set accelerating voltage to 1.0 kV.
(3)Open the Column Tab in the Setup dialog. Then select Normal probe current mode and UHR Focus mode.
(4)Set the Cond Lens 1 and Cond Lens 2 checkboxes to OFF in the Column Tab.
