WARNING

 

Voltages up to 100 V AC and 30 kV DC are used inside this

 

 

instrument. Do not touch inside or you may receive an electric shock.

 

Do not remove the covers of column unit, control unit or power unit

 

 

and do not touch internal parts or circuits while the instrument power

 

 

is turned on. There is a hazard of fatal or serious injury due to

Beware of

 

electric shock.

Avoid removing the covers of the instrument. If they must be

electric shock

 

 

removed, make sure to first turn off all power to the instrument.

Electron Gun / Ion pump Baking

The electron gun and ion pump are heated to about 250°C in order to keep the electron gun in a high vacuum. Touching these sections would result in burns.

Beware of high

 

 

 

 

Rotary Pump

 

 

temperature

 

 

The temperature of the oil rotary pump rises up to about 70°C, while it

 

 

 

is operating. Touching the pump may also result in burns.

 

 

 

 

 

 

Liquid Nitrogen

 

When you replenish liquid nitrogen in the cold-trap of DP and the

 

 

anti-contamination trap, be sure to wear eye-protection glasses and

Beware of low

 

protective gloves to keep liquid nitrogen from splashing on the eyes or

 

the skin.

temperature

 

 

 

 

 

Anyone working on the electrical part of the system should follow the correct lock-out tag-out procedures for that location.

The user should prepare a mains switch box on which the lock-out and the tag-out procedures are provided.

Electrical hazards can occur if lock-out tag-out procedures are not followed.

The ion-pump produces magnetic fields. There are fringing magnetic fields of about 100 Gauss from the ion-pump and 10 Gauss at the outside of the ion-pump cover.

Any person who has a pacemaker embedded is not allowed to approach the ion-pump.

Do not bring near to the ion-pump wristwatches and magnetic cards that are susceptible to magnetic fields.

Magnetic Fields

SAFETY - 10