CAUTION
(1)Never touch the electron gun with bare hands in the course of baking and cooling. High temperature during baking may cause burns.
(2)When using liquid nitrogen, wear leather gloves and protective glasses. There is danger if it touches the skin as it can cause low temperature burns. Also, make sure there is enough ventilation in the room to prevent oxygen deficiency.
(3)When the
(4)When setting the specimen tilt and the stage Z to minimum, there is a danger of contact that could scratch the specimen or objective lens. Be sure to use the special level gauge for setting the specimen and set the specimen height to be not more than 0.5 mm higher than the level gauge.
(5)Be careful not to hit your head when checking the specimen chamber because the beam monitor aperture, secondary electron detector, etc. are sticking out of the top area of the specimen exchange chamber.
(6)Do not place objects containing a magnetic powder in the specimen chamber.
The magnetism of the objective lens attracts the powder and it will attach to the magnetic pole of objective lens separating from the specimen stage. This causes a deterioration of performance.
(7)Since a magnetic specimen is strongly attracted by the magnetic field of the objective lens, secure it tightly to the specimen stage. If it is not tight enough, it may be drawn to the objective lens and cause problems.
(8)When the specimen stage is being manually operated, set it so as not to go over the limit in the Z axis or the Tilt (T) axis adjustments. Exceeding these limits may damage the specimen or parts of the specimen chamber.
(9)If the specimen stage is being manually operated, do not operate Z and T axes in the stage locked condition. This damages the stage lock system and causes deterioration of stage precision.
(10)The oil rotary pump is a heavy object that weighs 30 kg. Be very careful if it must be lifted or moved when performing maintenance.
(11)When performing maintenance on the compressor, open the drain valve slowly and drain the condensed water from the tank gradually. High air pressure inside the tank can cause dangerous splashing and spraying of the condensate if the drain is opened too quickly.
