Fig. 2-8a shows the control panel for evacuation.

STAGE POWER

 

 

 

switch

S.C EVAC

S.C AIR

 

EVAC POWER

 

switch

switch

EMERGENCY

switch

 

 

IP RESET

 

 

Display / Operation OFF switch

 

 

area

switches

 

 

 

IP POWER switch

APT HEAT

 

 

IP Backup PS

TMP

switch

Operation area

Indicator lamp

 

(Option)

Fig. 2-8a Evacuation Control Panel

 

[EMERGENCY OFF] switch

: Shuts down S-4800 entirely in an emergency.

[EVAC POWER] switch

: Main switch of evacuation system.

[STAGE POWER] switch

: Main switch of Stage controller (Type 2 only).

IP Backup PS operation area

: Optional Ion pump backup power supply operation area.

IP POWER switches

: Power switches of ion pump high voltage.

IP RESET switches

: Reset switches of ion pump high voltage.

 

Lamps inside of switches are lighten when IP high voltage is

 

ON.

 

SC EVAC switch

: Starts specimen chamber evacuation. The lamp blinks while

 

the sequence is advancing.

SC AIR switch

: Starts introduction of air into specimen chamber.

TMP indicator lamps

: POWER lamp indicates TMP power is ON. NORMAL shows

 

TMP is in normal running state.

APT HEATER switch

: When turned to AUTO, objective aperture heater will be on

 

when specimen chamber vacuum is high. When turned to

 

DEGASS, the heater is kept at higher temperature for

degassing. Set to AUTO for usual operation. The lamp is lit while heater current is ON.

2 - 8

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Image 70
Hitachi S-4800 manual 8a Evacuation Control Panel