Hitachi S-4800 manual 8a Evacuation Control Panel

Fig. 2-8a shows the control panel for evacuation.

STAGE POWER
switch	S.C EVAC	S.C AIR
EVAC POWER
	switch	switch	EMERGENCY
switch
IP RESET			Display / Operation OFF switch
			area
switches

IP POWER switch		APT HEAT
IP Backup PS	TMP	switch
Operation area	Indicator lamp
(Option)	Fig. 2-8a Evacuation Control Panel
[EMERGENCY OFF] switch	: Shuts down S-4800 entirely in an emergency.
[EVAC POWER] switch	: Main switch of evacuation system.
[STAGE POWER] switch	: Main switch of Stage controller (Type 2 only).
IP Backup PS operation area	: Optional Ion pump backup power supply operation area.
IP POWER switches	: Power switches of ion pump high voltage.
IP RESET switches	: Reset switches of ion pump high voltage.
	Lamps inside of switches are lighten when IP high voltage is
	ON.
SC EVAC switch	: Starts specimen chamber evacuation. The lamp blinks while
	the sequence is advancing.
SC AIR switch	: Starts introduction of air into specimen chamber.
TMP indicator lamps	: POWER lamp indicates TMP power is ON. NORMAL shows
	TMP is in normal running state.
APT HEATER switch	: When turned to AUTO, objective aperture heater will be on
	when specimen chamber vacuum is high. When turned to
	DEGASS, the heater is kept at higher temperature for

degassing. Set to AUTO for usual operation. The lamp is lit while heater current is ON.

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