Hitachi S-4800 manual Operation

3.OPERATION

Shown below is the procedural flow of typical SEM operation. For details, refer to each subsection.

3.1Preliminary Operation

3.2Specimen Setting

3.3Application of High Voltage

3.4Optimizing the Electron Beam

3.5Operation for Image Observation

3.6Saving and Recording Images

3.7SEM Data Manager

•	Check of Column Vacuum	(3.1.1)
•	Starting the Display	(3.1.2)

•Use of Anti-Contamination Trap and Cold Trap . (3.1.3)

•	Cautions on Specimen Preparation	(3.2.1)
•	Specimen Preparation for Materials	(3.2.2)
•	Adjustment Specimen Height	(3.2.3)
•	Specimen Exchange Position	(3.2.4)
•	How to Set Specimen	(3.2.5)
•	Flashing	(3.3.2)

•Setting of Accelerating Voltage and

	Emission Current	(3.3.3)
•	Application of High voltage	(3.3.4)
•	Selecting Electron Optical Column Condition	(3.4.1)
•	Column Alignment Operation	(3.4.2)
•	Selecting Magnification	(3.5.1)
•	Selecting Scanning Speed	(3.5.2)
•	Image Brightness and Contrast Adjustment	(3.5.3)
•	Focus and Astigmatism Correction	(3.5.4)
•	Operation of the Specimen Stage Type 1	(3.5.5)
•	Operation of the Specimen Stage Type 2	(3.5.6)
•	Saving and Recording Images	(3.6.1)
•	Setting Conditions for Image Capturing	(3.6.2)
•	Image Capturing	(3.6.3)

•Saving an Image Displayed

	in the Scanning Image Screen (Direct Save)	(3.6.4)
•	Saving Captured Images	(3.6.5)
•	Taking Photographs	(3.6.6)
•	Precaution about SEM Data Manager	(3.7.1)
•	Registering Images
	on SEM Data Manager Database	(3.7.2)
•	Using SEM Data Manager	(3.7.3)

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