
(2) Type II
Click the EXC button on the control panel. The stage is then moved to the specimen exchange position, and the color of the indicator beside the button turns green.
Specimen exchange positions: X: 35.0mm | Y: 55.0mm | |
R: 0゜ | T: 0゜ | Z: 8.0mm |
NOTICE: Do not repeat clicking the EXC button. The Stop button may become ineffective by it.
NOTICE: The specimen exchange position is not same as the stage home position. You need to move to the home position by clicking the HOME button after setting specimen.
CAUTION
Start specimen exchange operation after the color of the indicator is changed green.
3.2.5How to Set Specimen
Before setting a specimen on the specimen stage, make sure that the height of the specimen is aligned with the height gauge mark.
3.2.5.1 Extracting specimen from stage
When a specimen is set inside the chamber, extract the specimen as follows.
(1) Move stage to its specimen exchange position.
After the color indicator becomes green, press the OPEN button on the specimen exchange chamber.
Once the exchange chamber will be evacuated and then, the gate valve will open.
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