
3.4.3Column Alignment Operation
For the best performance of the instrument, alignment of the electron optical column axis is necessary. Generally, an electromagnetic alignment is sufficient, while a mechanical alignment may be needed for more critical applications.
Perform the following alignment when you change the accelerating voltage, Probe Current mode, or setting of Cond Lens1. If you notice the image moving while focusing or correcting astigmatism, only perform an Aperture Alignment or Stigma Alignment, respectively.
The
If an alignment operation has been made at a particular combination of settings, only a slight adjustment (usually Aperture Alignment) is necessary when you return to that condition.
For all electromagnetic alignments, either drag the mouse in the grid area of the Alignment dialog window or adjust the STIGMA/ALIGNMENT X and Y knobs on the control panel.
NOTICE: 1. For normal microscopy, use
2.Before performing mechanical alignment, wait for more than two hours after starting the heating of the objective lens aperture. If mechanical alignment is made immediately after the start of heating the objective lens aperture, the alignment condition will be affected by thermal expansion of the objective lens aperture.
3.To save operating conditions effectively, it is recommended to perform a Degauss operation after focusing and before column alignment.
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