5.CAUTIONS ON OPERATION

(1)During operation, occasionally confirm that the ion pumps are in a stable state. IP-1 2 × 10-7Pa or better

IP-2 2 × 10-6Pa or better IP-3 5 × 10-5Pa or better

(2)When emission current varies widely during operation depress the HV OFF switch to cut off high voltage of the electron gun. Then, set the flashing intensity to ‘2’ or ‘3’, and carry out flashing.

(3)When leaving the instrument depress the HV OFF switch.

(4)Avoid using excessive fixing agent (conductive paste or the like) when setting the specimen onto the specimen stub.

6.OTHERS

(1)Keep the instrument installation room under the following conditions even when the instrument is not in operation.

Room temperature : 5 to 25 °C

 

(temperature of diffusion pump cooling water also)

Humidity

: Less than 60%

Evacuation must be performed continuously even when the instrument is not used for a long time. An uninterruptible power supply must be provided for this purpose.

(2)The DP drain port should be located at a height of less than 20 cm from the floor.

PRECAUTION - 4

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Hitachi S-4800 manual Others