Hitachi S-4800 manual Low Mag mode area

For detailed condition setting, lick the Setup button on the above OPE CONDITION block. The Column tab of the Setup dialog window will open.

(Alternately the Column command in the Setup menu or the Setup button on the tool button area of the Operation panel are available.)

Probe Current mode selection

HIgh Mag mode area
	Focus mode selection
ON and OFF 1st Condenser lens	Set and indicate focusing
	working distance
ON and OFF 2nd Condenser lens	1st Condenser lens
	excitation selection
	Focus depth selection
ON and OFF	Objective lens degaussing
specimen bias voltage
ON and OFF	Low Mag mode area
Magntic sample mode	(Enabled when Low Mag mode)

Set ABCC link

(1)Selection of Probe Current mode, Focus mode, and Working distance are same as operation on the Operation panel.

(2)Cond Lens1 (1st Condenser Lens)

It is possible to adjust the probe current by setting Condenser Lens 1. Select a number from the pull-down menu, click on the up and down button (0.1 step), or key in a number (1.0 to 16.0) followed by the Return key. Probe current increases if a small number is set. If you uncheck the box, the Condenser lens 1 will turn off. This condition is used only for a mechanical alignment. For normal operation, check this box.

(3) Cond Lens2 (2nd Condenser Lens)

Condenser lens 2 can only be turned ON or OFF.

Normally, it is set to ON. Select OFF only for mechanical alignment of electron optical axis.

(4) Focus Depth

It is possible to change depth of focus by setting a value. It changes the beam convergence angle. The best resolution will be attainable with the value 1.0. Depth of focus will increase with large number. Note that the resolution will degrade if a value except for 1.0 is set because the beam convergence angle is an important parameter for the optimum resolution condition. Therefore set it to 1.0 for normal operation. In order to change the depth of focus,

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