Hitachi S-4800 manual XY movable range for various specimen size, Φ75 specimen

Models: S-4800

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Image 187

φ75 specimen

(0,17.5)

72.5,17.5)

 

Area of

 

observation

 

35,55)

Possible to observe

75mmφ

by rotation

 

(0,92.5)

72.5,92.5)

Possible to observe by rotation

φ100 specimen

(0,5)

85,5)

 

100mmφ

 

Area of

 

observation

 

35,55)

(0,105)

85,105)

φ125 specimen

φ150 specimen

 

 

 

150mmφ

(0,0)

97.5,0)

(0,0)

110,0)

 

125mmφ

 

 

 

Area of

 

Area of

 

 

observation

 

observation

 

 

 

 

 

35,55)

 

35,55)

Possible to observe

by rotation

(0,110)

97.5,110)

Possible to observe by

(0,110)

110,110)

rotation

φ200 specimen

Maximum observation area(φ116)

 

Possible to observe by

 

rotation

(6,24)

(84.5,24)

 

 

Area of

 

 

observation

 

 

35,55)

 

 

31

200mmφ

 

 

29

49.5

 

(6,86)

84.5,86)

 

Possible to observe by

 

 

rotation

 

 

100100 Mask

(0,0)

Area of

observation

 

Possible to observe by

rotation

35,55)

100100 arae

Possible to observe by

rotation

(0,110)

125125 Mask

(0,0)

 

(0,12)

(97,12)

 

観察可能領域

 

35,55)

(0,99)8

100,101)(97,98)

125125 area

Possible to observe by

rotation

106,110)

Fig 3-1 XY movable range for various specimen size

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Page 187
Image 187
Hitachi S-4800 manual XY movable range for various specimen size, Φ75 specimen