Hitachi S-4800 manual Table of Contents Cont’d

Table of Contents (Cont’d)

3.3 Application of High Voltage		3-12
3.3.1 Condition where the gun high voltage is applicable		3-12
3.3.2	Flashing	3-12
3.3.3 Setting of Accelerating Voltage and Emission Current		3-13
3.3.4 Application of High Voltage		3-14
3.4 Optimizing the Electron Beam		3-15
3.4.1 Selecting a Magnification Mode		3-15
3.4.2 Selecting Electron Optical Column Condition		3-15
3.4.3	Column Alignment Operation	3-20
3.5 Operation for Image Observation		3-24
3.5.1	SE detector	3-24
3.5.2	Selecting Magnification	3-18
3.5.3	Selecting Scanning Speed	3-29
3.5.4 Image Brightness and Contrast Adjustment		3-31
3.5.5 Focus and Astigmatism Correction		3-34
3.5.6 Operation of the Specimen Stage (Type I - Manual Stage)		3-37
3.5.7 Operation of the Specimen Stage (Type 2 - 5-Axis Motorized Stage) ....		3-41
3.6 Saving and Recording Images		3-71
3.6.1 Saving and Recording Images		3-71
3.6.2 Preparing Images for Recording		3-72
3.6.3 Setting Conditions for Image Capturing		3-73
3.6.4	Image Capturing	3-74
3.6.5 Saving a Scanning Image (Direct Save)		3-75
3.6.6	Saving Captured Images	3-76
3.6.7	Taking Photographs (Option)	3-76
3.7 Using SEM Data Manager		3-79
3.8 At the End of Daily Use		3-80
3.8.1 Turning High Voltage Off		3-80
3.8.2 Setting the Stage at the Specimen Exchange Position		3-80
3.8.3 Taking Out a Specimen		3-80
3.8.4 Closing Windows and Shutting the Display Power		3-82
3.9 Using Other Functions		3-83
3.9.1	Screen Mode	3-83
3.9.2 Split Screen and Dual Mag Mode		3-85
3.9.3 Signal Selection and Color Mixing		3-86
3.9.4	X-ray Analysis Mode	3-88
3.9.5	Signal Processing	3-90
3.9.6	Operating Condition Memory	3-92
3.9.7	Pseudo Color Display	3-94

- iv -