Before using the equipment, read this instruction manual and pertinent instruction manuals of relevant accessories to assure proper operation of the equipment.

Scope of Instruction Manual

This instruction manual comprises the following:

1.Installation (Requirements and Items to be Prepared by User)

2.Function (Description of Controls)

3.Operation (Viewing Images, Saving Data, and Taking Photographs)

4.Maintenance (Procedures, Troubleshooting, and Action on Power Failure)

5.Replacement Parts

6.Accessory Operation

This instruction manual describes the operation, maintenance, and specific precautions pertinent to daily operation on the model S-4800 scanning electron microscope.

First, read and get familiar with the safety precautions described in the opening pages and General Safety Guidelines.

FOREWORD - 2

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Hitachi S-4800 manual Foreword