Hitachi S-4800 manual Maintenance, ECO mode setting

Models: S-4800

1 294
Download 294 pages 5.17 Kb
Page 87
Image 87

(10) Help menu: Opens Help for S-4700 SEM operation.

Maintenance

Opens the Maintenance dialog window. Use it for checking

 

status of the Evacuation system, gun baking operation and

 

ECO mode setting.

Index

Show the index of S-4800 Help.

Search

Show the key-word search of S-4800 Help.

About FE-PC SEM

Indicates the version of S-4800 PC-SEM.

(11)Undo menu : Recovers previous status of doing following operation.

Auto Focus Auto Stigma

ABCC Stage Drive

2 - 25

Page 87
Image 87
Hitachi S-4800 manual Maintenance, ECO mode setting