(7) Z axis operation to a specified coordinate
On the circle of the Z axis tool, mouse pointer will be changed as shown below.
Press down the left button and move the mouse up or downward holding down the button. The circle moves following mouse and the Z axis value is shown in the indicator box. Then release the button. Stage will go to the Z position specified in the indicator box.
The change of Z is limited to a range allowable for the present Tilt angle.
(8) Z axis continuous driving
On the rectangles at the top and bottom of Z axis tool, mouse pointer will be changed as shown below.
Press down the left button on one of the rectangles. Stage will go up or down continuously while holding the button down. On the top rectangle, stage moves to shorter Z, and on the bottom, to longer Z.
Z motion will stop when it reached to the end of allowable range calculated using the present Tilt angle.
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