Hitachi S-4800 manual

［Alarm according to gun baking］

	Message	description	recovering operation
	No.
	E31(+	HV cable head is not placed to t	Refer to 4.10 Gun baking.
	buzzer)	the cable holder properly.
	E32(+	Baking protection cover is not put.
	buzzer)
	E34(+	Ion pump high voltage is not
	buzzer)	applied.
	E35(+	Ion pump 1 vacuum degraded
	buzzer)	while baking
	E36(+	Baking time setting is not correct.
	buzzer)
［Alarm according to ECO mode setting］
	E37(+	Start gun baking while in ECO	Refer to ECO mode operation
	buzzer)	mode
	E38(+	Evacuation start time must be 5
		hours or more later from present
	buzzer)
		time.
	E39(+	Start ECO mode while gun baking
	buzzer)
		Specimen exchange rod is not at
	E99(+	its proper position or at present in
	buzzer)	other errors (E01, E02, E03,
		E05, E08, E09, E06, E14)
［Errors due to equipment failure］
		Control power supply error	Contact to service engineer
	E01（＊）	(DC24V)
	E02（＊）	Control power supply error
		(DC15V)
	E03（＊）	Control power supply error
		(DC12)
	E04（＊）	Vacuum valve did not work
		correct
	E05（＊）	Rotary pump (or dry pump) is not
		working
	E06（＊）	GV did not work correct
	E07（＊）	Filament of Pi gauge broken

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