Hitachi S-4800 Off, Align, Operate, Aperture, Alignment, Alignment, Reset button, Close button, Reset All button, Aperture Align button, Fig 2-26Alignment window

2.3.10SEM Data Manager Window

SEM Data Manager is an image-filing program with an easy-to-operate database function. Images are registered to the database automatically when saved.

For detail, refer to <3.12 Using SEM Data Manager>

2.3.11Alignment Dialog Window

The Alignment dialog window is used for alignment operations.

To open the dialog window, click the Wobbler button in the Scanning Image window or the

Column Alignment button on the toolbar. Or select the Alignment command from the Operate menu. When the dialog window is opened with the Wobbler button, Aperture Alignment (when the magnification mode is High Mag) or Low Mag Position (when the magnification mode is Low Mag) starts as the default setting.

Refer to <3.4.3 Column Alignment Operation>

Function select buttons Alignment operation area

	Next step button
			Fig 2-26 Alignment window
1.	Function select buttons	Starts each alignment function. Off stops functions.
2.	Aperture Align button	Starts Aperture Alignment function. It is the same as the Aperture
		Align select button. But it is an independent button since it is used
		frequently.
3.	Reset button	Resets alignment of the selected function.
4.	Reset All button	Resets alignment of all functions.
5.	Alignment	This area is used for adjustment operation. When the mouse pointer
	operation area	is	, you can make adjustment both in X or X direction by
		moving the mouse pressing the left button. When the mouse pointer
		is	or	, adjustment direction is restricted in X or Y direction.
6.	Close button	Stops alignment operation and closes the dialog window.
7.	Next step button	Activates next alignment function.

F4 key steps to the next alignment function, and Shift + F4 key to previous function.

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