Hitachi S-4800 manual Beware of high Temperature

After selecting baking time, check items described in above (11). And then, press START button.

In both case starting gun baking on the GUI or evacuation control panel, an error will be shown in the Numeric / character display and buzzer sound if something incorrect setting is found.

Refer the following table if an error is generated.

Message	description	recovering operation
No.
E31(+	HV cable head is not placed to t	Refer to above (4)
buzzer)	the cable holder properly.
E32(+	Baking protection cover is not	Check the baking cover or connector
buzzer)	put.	cover. Refer to above (9) and (10)
E34(+	Ion pump high voltage is not	IP1 to IP3 shall be ON to start baking.
buzzer)	applied.
E35(+	Ion pump 1 vacuum degraded	It will be generated when IP vacuum
buzzer)	while baking	degraded by heating. Heater current will
		be stop and start again when vacuum
		recovered to the specified value. You
		may leave the message.
E36(+	Baking time setting is not correct.	Inner bake time shall be less or equal to
buzzer)		(outer bake time + 2 hours).
		And outer bake time shall 2 hours or
		more.

In each case, error message will be cleared by STOP switch. Baking is not started. Remove cause of errors and repeat time setting. And then start again.

(13) After gun baking finished, wait about 6 hours for cooling.

Remove the baking protection cover and baking heaters. Put the column cover. Refer to above (5) to (10) in reverse order.

CAUTION

Beware of high

temperature

Electron gun/ion pump baking

It will take about 6 hours for cooling down to close to room temperature after gun baking is finished.

Before passing the above cooling time, the electron gun and ion pumps are still hot.

(14)Check and clean dust on the HV cable and inside the cable socket and insert the cable. Put the protection cover at the top of the gun.

4-24