Hitachi S-4800 manual When Specimen Chamber Vacuum is not Good, When Ion Pump Vacuum Degraded

(4) If you do not find any failure mentioned above, contact a service engineer.

4.4.3When Specimen Chamber Vacuum is not Good

If HV applicable status (HV indicator on GUI blinks in yellow and ON button is enable) is not given even after about 1 to 1.5 hour has been passed from starting specimen chamber evacuation check the followings.

(1) Check specimen chamber vacuum. It shall be better than 2x10-3Pa to apply HV.

Note that in the period of 15 minutes after TMP NORMAL lamp is lit, HV does not becomes enable to be applied.

(2)If you attached some assembly unit, e.g. objective lens aperture unit, before starting evacuation, introduce air into the specimen chamber and detach the unit. Clean up and grease up the O-ring of the unit and attach it again. Then, start evacuation again.

(3)Check if your specimen is not wet. If the specimen is not dry, outgas from the specimen may cause long evacuation time.

(4)If you do not find any failure mentioned above, contact a service engineer.

4.4.4When Ion Pump Vacuum Degraded

When ion pump vacuum indicators are worse than the followings, carry out gun baking referring to instruction manual.

IP1: 2 x 10-7Pa

IP2: 2 x 10-6Pa

IP3: 5 x 10-5Pa

If these are not improved by gun baking, contact a service engineer.

CAUTION

Beware of

electric shock

•Voltages up to 100 V AC and 30 kV DC are used in this instrument. Touching the interior could cause an electric shock.

•Never remove the covers of main unit, control unit or power unit and touch internal parts or circuits while power is connected to the instrument. There is a danger of fatal or serious injury due to electric shock.

•Do not detach the covers of the instrument.

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